Subscribe to receive more articles like this: Print/digital

AMC control in the fab requires not just the knowledge of which contaminants can be harmful, but requires a high level of competency in several disciplines for the careful selection and implementation of products to result in a total solution.

Abstract
The ability to control Airborne Molecular Contaminants (AMC) and their interactions with semiconductor fabrication processes and equipment requires a new, comprehensive approach. Multiple disciplines and competencies are required to bring a systematic understanding to both the challenges and potential solutions. Four steps that comprise the essential elements needed in a multistep, multilevel, integrated approach to data-driven and cost-effective 21st century AMC control are explored in this article.

To read the entire article, sign up for a free subscription and then click on
Click here for the digital edition of the current issue